1. Handbook of silicon based MEMS materials & technologies
Author: by Veikko Lindroos ... ]et al.[
Library: Central Library and Information Center of Ferdowsi University of Mashhad (Khorasan Razavi)
Subject: ، Microelectromechanical systems,Materials ، Microelectromechanical systems,Electric properties ، Silicon
Classification :
TK
7872
.
H35
2010
